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 Amtech Systems Inc., Tempe, Ariz., said
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 its preliminary year-end results of operations indicate substantial improvement over the previous fiscal year.
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 Amtech,
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 which makes an automated process system
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 that improves the yields of semiconductor manufacturers,
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 said
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 profit for the year
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 ended Sept. 30
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 rose to more than $800,000 from $446,000 last year.
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 Per-share earnings are estimated at more than 40 cents, up from 22 cents for fiscal 1988.
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 Total revenue is expected to double to more than $22 million from $10.8 million.
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 Amtech,
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 which also provides technical temporary employment services to aerospace, defense, computer and high-tech companies in the Southwest and Baltimore-Washington areas,
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 said
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 its final audited results are due in late November.
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 The company attributed the improvement to strong demand in the semiconductor equipment segment as well as the acquisition of Echelon Service Co. and the inclusion of a full year's results of operations for RTS Inc.,
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 compared with seven months' results for the prior year.
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